Publication:
Influence of dry-etch patterning of top electrode and SrBi2Ta2O9 on the properties of ferroelectric capacitors
Date
| dc.contributor.author | Goux, Ludovic | |
| dc.contributor.author | Paraschiv, Vasile | |
| dc.contributor.author | Lisoni, Judit | |
| dc.contributor.author | Schwitters, Michael | |
| dc.contributor.author | Maes, David | |
| dc.contributor.author | Haspeslagh, Luc | |
| dc.contributor.author | Wouters, Dirk | |
| dc.contributor.author | Casella, P. | |
| dc.contributor.author | Zambrano, R. | |
| dc.contributor.imecauthor | Goux, Ludovic | |
| dc.contributor.imecauthor | Paraschiv, Vasile | |
| dc.contributor.imecauthor | Haspeslagh, Luc | |
| dc.contributor.orcidimec | Goux, Ludovic::0000-0002-1276-2278 | |
| dc.date.accessioned | 2021-10-16T01:48:13Z | |
| dc.date.available | 2021-10-16T01:48:13Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10518 | |
| dc.source.beginpage | C865 | |
| dc.source.endpage | C869 | |
| dc.source.issue | 12 | |
| dc.source.journal | Journal of the Electrochemical Society | |
| dc.source.volume | 152 | |
| dc.title | Influence of dry-etch patterning of top electrode and SrBi2Ta2O9 on the properties of ferroelectric capacitors | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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