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A highly reliable 3-dimensional integrated SBT ferroelectric capacitor enabling FeRAM scaling

dc.contributor.authorGoux, Ludovic
dc.contributor.authorRusso, G.
dc.contributor.authorMenou, N.
dc.contributor.authorLisoni, Judit
dc.contributor.authorSchwitters, M.
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorMaes, David
dc.contributor.authorArtoni, C.
dc.contributor.authorCorallo, G.
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorZambrano, R.
dc.contributor.authorMuller, Ch.
dc.date.accessioned2021-10-16T01:48:42Z
dc.date.available2021-10-16T01:48:42Z
dc.date.issued2005-04
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10520
dc.sourceIIOimport
dc.titleA highly reliable 3-dimensional integrated SBT ferroelectric capacitor enabling FeRAM scaling
dc.typeJournal article
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.source.peerreviewno
dc.source.beginpage447
dc.source.endpage453
dc.source.journalIEEE Trans. Electron Devices
dc.source.issue4
dc.source.volume52
imec.availabilityPublished - imec


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