Authors

Goux, Ludovic; Russo, G.; Menou, N.; Lisoni, Judit; Schwitters, M.; Paraschiv, Vasile; Maes, David; Artoni, C.; Corallo, G.; Haspeslagh, Luc; Wouters, Dirk; Zambrano, R.; Muller, Ch.

Issue

4

Journal

IEEE Trans. Electron Devices

Volume

52

Title

A highly reliable 3-dimensional integrated SBT ferroelectric capacitor enabling FeRAM scaling

Publication type

Journal article