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A highly reliable 3-dimensional integrated SBT ferroelectric capacitor enabling FeRAM scaling
Publication:
A highly reliable 3-dimensional integrated SBT ferroelectric capacitor enabling FeRAM scaling
Date
2005-04
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Goux, Ludovic
;
Russo, G.
;
Menou, N.
;
Lisoni, Judit
;
Schwitters, M.
;
Paraschiv, Vasile
;
Maes, David
;
Artoni, C.
;
Corallo, G.
;
Haspeslagh, Luc
;
Wouters, Dirk
;
Zambrano, R.
;
Muller, Ch.
Journal
IEEE Trans. Electron Devices
Abstract
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1982
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1982
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations