Publication:

A highly reliable 3-dimensional integrated SBT ferroelectric capacitor enabling FeRAM scaling

Date

2005-04
Journal article
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Author(s)

Goux, Ludovic  
;
Russo, G.
;
Menou, N.
;
Lisoni, Judit
;
Schwitters, M.
;
Paraschiv, Vasile  
;
Maes, David
;
Artoni, C.
;
Corallo, G.
;
Haspeslagh, Luc  
;
Wouters, Dirk
;
Zambrano, R.
;
Muller, Ch.

Journal

IEEE Trans. Electron Devices

Abstract

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1987 since deposited on 2021-10-16
Acq. date: 2026-05-16

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1987 since deposited on 2021-10-16
Acq. date: 2026-05-16

Citations