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Novel selective sidewall airgap process

dc.contributor.authorGueneau de Mussy, Jean Paul
dc.contributor.authorBruynseraede, Christophe
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBeyer, Gerald
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T01:51:23Z
dc.date.available2021-10-16T01:51:23Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10533
dc.sourceIIOimport
dc.titleNovel selective sidewall airgap process
dc.typeProceedings paper
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage150
dc.source.endpage152
dc.source.conferenceProceedings of the IEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate6/06/2005
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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