Impact of plasma pre-treatment before SiNx passivation on AlGaN/GaN HFETs electrical traps

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Authors

Guhel, Y.; Boudart, B.; Vellas, N.; Gaquiere, C.; Delos, E.; Ducatteau, D.; Bougrioua, Z.; Germain, Marianne

Issue

10

Journal

Solid-State Electronics

Volume

19

Title

Impact of plasma pre-treatment before SiNx passivation on AlGaN/GaN HFETs electrical traps

Publication type

Journal article

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