Linearity of TXRF: droplet residues versus spin-coated wafers

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Authors
Hellin, David; Fyen, Wim; Rip, Jens; Delande, Tinne; De Gendt, Stefan; Vinckier, Chris
Conference
11th Conference on Total Reflection X-Ray Fluorescence Analysis and Related Methods - TXRF
Title
Linearity of TXRF: droplet residues versus spin-coated wafers
Publication type
Proceedings paper
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