Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Metal analysis methodology for novel materials in IC manufacturing
Metadata
Show full item record
Authors
Hellin, David
;
Rip, Jens
;
De Gendt, Stefan
;
Mertens, Paul
;
Vinckier, Chris
Conference
ISSM Workshop 2 - Manufacturing Impact From Introducing New Materials in Production
Title
Metal analysis methodology for novel materials in IC manufacturing
Publication type
Proceedings paper
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login