dc.contributor.author | Hendrickx, Eric | |
dc.contributor.author | Van Look, Lieve | |
dc.contributor.author | Versluijs, Janko | |
dc.contributor.author | Ronse, Kurt | |
dc.date.accessioned | 2021-10-16T01:59:57Z | |
dc.date.available | 2021-10-16T01:59:57Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10571 | |
dc.source | IIOimport | |
dc.title | Hyper-NA imaging using two-beam interference | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Hendrickx, Eric | |
dc.contributor.imecauthor | Van Look, Lieve | |
dc.contributor.imecauthor | Versluijs, Janko | |
dc.contributor.imecauthor | Ronse, Kurt | |
dc.contributor.orcidimec | Ronse, Kurt::0000-0003-0803-4267 | |
dc.source.peerreview | no | |
dc.source.conference | 2nd International Symposium on Immersion Lithography | |
dc.source.conferencedate | 12/09/2005 | |
dc.source.conferencelocation | Brugge Belgium | |
imec.availability | Published - imec | |