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Hyper-NA imaging using two-beam interference

dc.contributor.authorHendrickx, Eric
dc.contributor.authorVan Look, Lieve
dc.contributor.authorVersluijs, Janko
dc.contributor.authorRonse, Kurt
dc.date.accessioned2021-10-16T01:59:57Z
dc.date.available2021-10-16T01:59:57Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10571
dc.sourceIIOimport
dc.titleHyper-NA imaging using two-beam interference
dc.typeProceedings paper
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.source.peerreviewno
dc.source.conference2nd International Symposium on Immersion Lithography
dc.source.conferencedate12/09/2005
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - imec


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