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Laser ablation and laser direct writing as enabling technologies for the definition of micro-optical elements

dc.contributor.authorHendrickx, Nina
dc.contributor.authorHimansu, Suyal
dc.contributor.authorVan Steenberge, Geert
dc.contributor.authorMcCarthy, Aongus
dc.contributor.authorWalker, Andy
dc.contributor.authorOttevaere, Heidi
dc.contributor.authorThienpont, Hugo
dc.contributor.authorTaghizadeh, Mohammed
dc.contributor.authorVan Daele, Peter
dc.date.accessioned2021-10-16T02:00:54Z
dc.date.available2021-10-16T02:00:54Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10573
dc.sourceIIOimport
dc.titleLaser ablation and laser direct writing as enabling technologies for the definition of micro-optical elements
dc.typeProceedings paper
dc.contributor.imecauthorVan Steenberge, Geert
dc.contributor.imecauthorVan Daele, Peter
dc.contributor.orcidimecVan Steenberge, Geert::0000-0001-8574-1235
dc.contributor.orcidimecVan Daele, Peter::0000-0003-0557-7741
dc.source.peerreviewno
dc.source.beginpage59561B
dc.source.conferenceIntegrated Optics: Theory and Applications
dc.source.conferencedate28/08/2005
dc.source.conferencelocationWarsaw Poland
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 5956


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