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Laser ablation as an enabling technology for the structuring of optical multilayer structures

dc.contributor.authorHendrickx, Nina
dc.contributor.authorVan Steenberge, Geert
dc.contributor.authorGeerinck, Peter
dc.contributor.authorVan Daele, Peter
dc.date.accessioned2021-10-16T02:01:46Z
dc.date.available2021-10-16T02:01:46Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10576
dc.sourceIIOimport
dc.titleLaser ablation as an enabling technology for the structuring of optical multilayer structures
dc.typeProceedings paper
dc.contributor.imecauthorVan Steenberge, Geert
dc.contributor.imecauthorVan Daele, Peter
dc.contributor.orcidimecVan Steenberge, Geert::0000-0001-8574-1235
dc.contributor.orcidimecVan Daele, Peter::0000-0003-0557-7741
dc.source.peerreviewno
dc.source.beginpage171
dc.source.conference8th International Conference on Laser Ablation - COLA
dc.source.conferencedate11/09/2005
dc.source.conferencelocationBanff Canada
imec.availabilityPublished - imec


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