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Ion beam mixing and oxidation of a Si/Ge-multilayer under oxygen bombardment

dc.contributor.authorDe Coster, Walter
dc.contributor.authorBrijs, Bert
dc.contributor.authorOsiceanu, Petre
dc.contributor.authorAlay, Josep Lluis
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-29T12:40:29Z
dc.date.available2021-09-29T12:40:29Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/105
dc.sourceIIOimport
dc.titleIon beam mixing and oxidation of a Si/Ge-multilayer under oxygen bombardment
dc.typeJournal article
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage911
dc.source.endpage915
dc.source.journalNuclear Instruments and Methods in Physics Research B
dc.source.volume85
imec.availabilityPublished - open access


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