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Characterization of atomic-beam deposited GeO1-xNx/HfO2 stacks on Ge

dc.contributor.authorHoussa, Michel
dc.contributor.authorConard, Thierry
dc.contributor.authorVan Steenbergen, Jan
dc.contributor.authorMavrou, G.
dc.contributor.authorPanayiotatos, Y.
dc.contributor.authordimoulas, A.
dc.contributor.authorMeuris, Marc
dc.contributor.authorCaymax, Matty
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-16T02:10:56Z
dc.date.available2021-10-16T02:10:56Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10614
dc.sourceIIOimport
dc.titleCharacterization of atomic-beam deposited GeO1-xNx/HfO2 stacks on Ge
dc.typeMeeting abstract
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVan Steenbergen, Jan
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.source.peerreviewno
dc.source.conferenceMeeting Abstracts 208th ECS Meeting
dc.source.conferencedate16/10/2005
dc.source.conferencelocationLos Angeles, CA USA
imec.availabilityPublished - imec


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