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Reliability issues in high-k based devices

dc.contributor.authorHoussa, Michel
dc.contributor.authorDegraeve, Robin
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorAoulaiche, Marc
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-16T02:11:28Z
dc.date.available2021-10-16T02:11:28Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10616
dc.sourceIIOimport
dc.titleReliability issues in high-k based devices
dc.typeProceedings paper
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage32
dc.source.endpage41
dc.source.conference4th International Conference on Semiconductor Technology - ISTC
dc.source.conferencedate15/03/2005
dc.source.conferencelocationShanghai China
imec.availabilityPublished - imec


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