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Influence of UV-cure on low-k properties

dc.contributor.authorIacopi, Francesca
dc.date.accessioned2021-10-16T02:13:56Z
dc.date.available2021-10-16T02:13:56Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10626
dc.sourceIIOimport
dc.titleInfluence of UV-cure on low-k properties
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference
dc.source.conferencedate27/09/2005
dc.source.conferencelocationColorado Springs, CO USA
imec.availabilityPublished - imec


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