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Effects of UV-cure on mechanical, physical and electrical properties of microporous SiOC:H dielectric films
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1987 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
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Metrics
Views
1987 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
Citations