Show simple item record

Polysilicon encapsulated LOCOS for deep submicron CMOS lateral isolation

dc.contributor.authorBadenes, Gonçal
dc.contributor.authorRooyackers, Rita
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorDeferm, Ludo
dc.date.accessioned2021-09-29T14:16:10Z
dc.date.available2021-09-29T14:16:10Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1063
dc.sourceIIOimport
dc.titlePolysilicon encapsulated LOCOS for deep submicron CMOS lateral isolation
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorDeferm, Ludo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage46
dc.source.endpage48
dc.source.conferenceExtended Abstracts of the 1996 International Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate26/08/1996
dc.source.conferencelocationYokohama Japan
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
1040.pdf
Size:
1.049Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record