Poly encapsulated LOCOS lateral isolation for 0.25 µm CMOS

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Authors
Badenes, Gonçal; Rooyackers, Rita; Deferm, Ludo
Conference
Proceedings of the 26th European Solid-State Device Research Conference - ESSDERC
Title
Poly encapsulated LOCOS lateral isolation for 0.25 µm CMOS
Publication type
Proceedings paper
Embargo date
9999-12-31
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