Authors

Janssens, Tom; Huyghebaert, Cedric; Vanhaeren, Danielle; Winderickx, Gillis; Satta, Alessandra; Meuris, Marc; Vandervorst, Wilfried

Conference

8th International Workshop on the Fabrication, Characterization and Modeling of Ultra-Shallow Junctions in Semiconductors

Title

Heavy ion implantation in Ge: dramatic radiation induced morphology in Ge

Publication type

Oral presentation