Mechanical and electrical characterization of BCB as a bond and seal material for cavities housing (RF-) MEMS devices

Publication:

2005

Journal article

Author(s)

;

;

Baert, Kris

;

;

Journal of Micromechanics and Microengineering

1956 since deposited on 2021-10-16

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Acq. date: 2026-07-18