Publication:
Mechanical and electrical characterization of BCB as a bond and seal material for cavities housing (RF-) MEMS devices
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1952 since deposited on 2021-10-16
2last month
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Acq. date: 2025-12-17
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1952 since deposited on 2021-10-16
2last month
2last week
Acq. date: 2025-12-17
Citations