dc.contributor.author | Jourdain, Anne | |
dc.contributor.author | Vaesen, Kristof | |
dc.contributor.author | Scheer, Jacco | |
dc.contributor.author | Weekamp, Wim | |
dc.contributor.author | van Beek, Joost | |
dc.contributor.author | Tilmans, Harrie | |
dc.date.accessioned | 2021-10-16T02:23:52Z | |
dc.date.available | 2021-10-16T02:23:52Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10665 | |
dc.source | IIOimport | |
dc.title | From zero- to second-level packaging of RF-MEMS devices | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Jourdain, Anne | |
dc.contributor.imecauthor | Vaesen, Kristof | |
dc.contributor.imecauthor | Tilmans, Harrie | |
dc.contributor.orcidimec | Vaesen, Kristof::0000-0001-9971-3593 | |
dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
dc.source.peerreview | no | |
dc.source.beginpage | 36 | |
dc.source.endpage | 39 | |
dc.source.conference | Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems - MEMS | |
dc.source.conferencedate | 30/01/2005 | |
dc.source.conferencelocation | | |
imec.availability | Published - imec | |