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In Situ Observation by RBS of Preferential Sputtering During Low Energy Ion Bombardment

dc.contributor.authorDe Coster, Walter
dc.contributor.authorBrijs, Bert
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-29T12:40:29Z
dc.date.available2021-09-29T12:40:29Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/106
dc.sourceIIOimport
dc.titleIn Situ Observation by RBS of Preferential Sputtering During Low Energy Ion Bombardment
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conference13th International Conference on the Application of Accelerators in Research and Industry; November 7-10, 1994; Denton, Texas, U
imec.availabilityPublished - imec


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