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Stress and stress gradient compensation technique for MEM actuators

dc.contributor.authorKlaasse, Gerard
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-16T02:34:20Z
dc.date.available2021-10-16T02:34:20Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10704
dc.sourceIIOimport
dc.titleStress and stress gradient compensation technique for MEM actuators
dc.typeProceedings paper
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage157
dc.source.endpage160
dc.source.conferenceProceedings of MEMSWAVE
dc.source.conferencedate23/06/2005
dc.source.conferencelocationLausanne Switzerland
imec.availabilityPublished - imec


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