Mechanisms of arsenic segregation to the Ni2Si/SiO2 interface during Ni2Si formation

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Authors

Kmieciak, Malgorzata; Janssens, Tom; Lauwers, Anne; Vantomme, Andre; Vandervorst, Wilfried; Maex, Karen; Kittl, Jorge

Issue

18

Journal

Applied Physics Letters

Volume

87

Title

Mechanisms of arsenic segregation to the Ni2Si/SiO2 interface during Ni2Si formation

Publication type

Journal article

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