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Characterization and process integration of a low-k spin-on dielectric

dc.contributor.authorBallantyne, Catherine
dc.contributor.authorForester, Lynn
dc.contributor.authorWaeterloos, Joost
dc.date.accessioned2021-09-29T14:16:33Z
dc.date.available2021-09-29T14:16:33Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1074
dc.sourceIIOimport
dc.titleCharacterization and process integration of a low-k spin-on dielectric
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceInternational Conference on Metallurgical Coatings and Thin Films; April 22-26, 1996; San Diego, Calif., USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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