Application of porous low-k dielectrics and copper in microelectronics

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Authors
Le, Quoc Toan; Baklanov, Mikhaïl; Claeys, Cor; Snow, Jim; Vanhaelemeersch, Serge
Conference
Seminar on Micro-Nanotechnology
Title
Application of porous low-k dielectrics and copper in microelectronics
Publication type
Oral presentation
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