Show simple item record

Full spectral analysis of line edge roughness

dc.contributor.authorLeunissen, Peter
dc.contributor.authorLorusso, Gian
dc.contributor.authorErcken, Monique
dc.contributor.authorCroon, Jeroen
dc.contributor.authorYang, H.
dc.contributor.authorAzordegan, A.
dc.contributor.authorDiBiase, Tony
dc.date.accessioned2021-10-16T02:53:13Z
dc.date.available2021-10-16T02:53:13Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10773
dc.sourceIIOimport
dc.titleFull spectral analysis of line edge roughness
dc.typeProceedings paper
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorErcken, Monique
dc.source.peerreviewno
dc.source.beginpage499
dc.source.endpage509
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XIX
dc.source.conferencedate28/02/2005
dc.source.conferencelocationSan Jose, A USA
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 5752


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record