Show simple item record

Investigation of statistical Fluctuations on line edge rougness

dc.contributor.authorLeunissen, Peter
dc.contributor.authorPatsis, G.P.
dc.contributor.authorVan Steenwinckel, David
dc.contributor.authorLammers, Jeroen
dc.date.accessioned2021-10-16T02:53:46Z
dc.date.available2021-10-16T02:53:46Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10775
dc.sourceIIOimport
dc.titleInvestigation of statistical Fluctuations on line edge rougness
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceCharged Particle Lithography Workshop
dc.source.conferencedate23/09/2005
dc.source.conferencelocationVienna Austria
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record