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Epitaxy solutions for Ge MOS technology

dc.contributor.authorLeys, Frederik
dc.contributor.authorBonzom, Renaud
dc.contributor.authorLoo, Roger
dc.contributor.authorRichard, Olivier
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorVan Steenbergen, Jan
dc.contributor.authorDessein, Kristof
dc.contributor.authorConard, Thierry
dc.contributor.authorRip, Jens
dc.contributor.authorBender, Hugo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMeuris, Marc
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-16T02:54:39Z
dc.date.available2021-10-16T02:54:39Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10778
dc.sourceIIOimport
dc.titleEpitaxy solutions for Ge MOS technology
dc.typeProceedings paper
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorVan Steenbergen, Jan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorRip, Jens
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.source.peerreviewno
dc.source.conference4th International Conference on Silicon Epitaxy and Heterostructures - ICSI-4
dc.source.conferencedate23/05/2005
dc.source.conferencelocationHyogo Japan
imec.availabilityPublished - imec


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