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Layout dependency induced deviation from Poisson area scaling in BEOL dielectric reliability

dc.contributor.authorLi, Yunlong
dc.contributor.authorTokei, Zsolt
dc.contributor.authorRoussel, Philippe
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T02:55:31Z
dc.date.available2021-10-16T02:55:31Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10781
dc.sourceIIOimport
dc.titleLayout dependency induced deviation from Poisson area scaling in BEOL dielectric reliability
dc.typeProceedings paper
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1299
dc.source.endpage1304
dc.source.conferenceProceedings of the 16th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis - ESREF
dc.source.conferencedate10/10/2005
dc.source.conferencelocationArcachon France
imec.availabilityPublished - open access


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