Publication:

Molecular beam epitaxy for advanced gate stack materials and processes

Date

2005
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Author(s)

Locquet, Jean-Pierre
;
Marchiori, Chiara
;
Sousa, M.
;
Siegwart, H.
;
Caimi, D.
;
Fompeyrine, Jean
;
Pantisano, Luigi
;
Claes, Martine  
;
Conard, Thierry  
;
Demand, Marc  
;
Deweerd, Wim
;
De Gendt, Stefan  
;
Heyns, Marc  
;
Houssa, Michel  
;
Aoulaiche, Marc
;
Lujan, Guilherme
;
Ragnarsson, Lars-Ake  
;
Rohr, Erika
;
Schram, Tom  
;
Hooker, Jacob
;
Rittersma, Chris
;
Furukawa, Yukiko
;
Seo, J.W.
;
dimoulas, A.

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Abstract

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1983 since deposited on 2021-10-16
Acq. date: 2026-01-06

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1983 since deposited on 2021-10-16
Acq. date: 2026-01-06

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