dc.contributor.author | Maenhoudt, Mireille | |
dc.contributor.author | Van Den Heuvel, Dieter | |
dc.contributor.author | Cheng, Shaunee | |
dc.contributor.author | Laidler, David | |
dc.contributor.author | Hermans, Jan | |
dc.date.accessioned | 2021-10-16T03:07:30Z | |
dc.date.available | 2021-10-16T03:07:30Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10818 | |
dc.source | IIOimport | |
dc.title | Performance update of XT:1250Di | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Van Den Heuvel, Dieter | |
dc.contributor.imecauthor | Laidler, David | |
dc.contributor.imecauthor | Hermans, Jan | |
dc.contributor.orcidimec | Laidler, David::0000-0003-4055-3366 | |
dc.contributor.orcidimec | Hermans, Jan::0000-0003-1249-8902 | |
dc.source.peerreview | no | |
dc.source.conference | 2nd International Symposium on Immersion Lithography | |
dc.source.conferencedate | 12/09/2005 | |
dc.source.conferencelocation | Brugge Belgium | |
imec.availability | Published - imec | |