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Effect of plasma treatments on a low-k dielectric polymer surface
Publication:
Effect of plasma treatments on a low-k dielectric polymer surface
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Date
2005
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Martin Hoyas, Ana
;
Schuhmacher, Jorg
;
Whelan, Caroline
;
Baklanov, Mikhaïl
;
Carbonell, Laure
;
Celis, Jean-Pierre
;
Maex, Karen
Journal
Journal of Vacuum Science Technology B
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1920
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Views
1920
since deposited on 2021-10-16
1
last month
1
last week
Acq. date: 2026-01-07
Citations