Effect of plasma treatments on a low-k dielectric polymer surface

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Authors

Martin Hoyas, Ana; Schuhmacher, Jorg; Whelan, Caroline; Baklanov, Mikhaïl; Carbonell, Laure; Celis, Jean-Pierre; Maex, Karen

Issue

4

Journal

Journal of Vacuum Science Technology B

Volume

23

Title

Effect of plasma treatments on a low-k dielectric polymer surface

Publication type

Journal article

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