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Effect of plasma treatments on a low-k dielectric polymer surface

dc.contributor.authorMartin Hoyas, Ana
dc.contributor.authorSchuhmacher, Jorg
dc.contributor.authorWhelan, Caroline
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorCarbonell, Laure
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T03:19:50Z
dc.date.available2021-10-16T03:19:50Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10864
dc.sourceIIOimport
dc.titleEffect of plasma treatments on a low-k dielectric polymer surface
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage1551
dc.source.endpage1557
dc.source.journalJournal of Vacuum Science Technology B
dc.source.issue4
dc.source.volume23
imec.availabilityPublished - imec


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