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Temperature induced microstructural changes and deformation of metal alloys used for RF-MEMS switches

dc.contributor.authorModlinski, Robert
dc.contributor.authorPuers, Bob
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-16T03:28:18Z
dc.date.available2021-10-16T03:28:18Z
dc.date.issued2005-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10893
dc.sourceIIOimport
dc.titleTemperature induced microstructural changes and deformation of metal alloys used for RF-MEMS switches
dc.typeProceedings paper
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage183
dc.source.endpage186
dc.source.conferenceProceedings of the 16th MicroMechanics Europe Workshop - MME
dc.source.conferencedate4/09/2005
dc.source.conferencelocationGoteborg Sweden
imec.availabilityPublished - imec
imec.internalnotesP40


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