Modeling of doping profile in active-silicon region of silicon-on-insulator transistor as a function of channel length
dc.contributor.author | Mody, Jay | |
dc.contributor.author | Ghosh, Prasanta | |
dc.date.accessioned | 2021-10-16T03:28:51Z | |
dc.date.available | 2021-10-16T03:28:51Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10895 | |
dc.source | IIOimport | |
dc.title | Modeling of doping profile in active-silicon region of silicon-on-insulator transistor as a function of channel length | |
dc.type | Proceedings paper | |
dc.source.peerreview | yes | |
dc.source.conference | Digest International Semiconductor Device Research Symposium | |
dc.source.conferencedate | 7/12/2005 | |
dc.source.conferencelocation | Washington D.C. USA | |
imec.availability | Published - imec | |
imec.internalnotes | CD-ROM Proceedings |
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