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In-situ fabrication of micro-optical elements in transparent encapsulants with excimer laser-ablation

dc.contributor.authorNaessens, Kris
dc.contributor.authorBockstaele, R.
dc.contributor.authorRits, Olivier
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-16T03:36:21Z
dc.date.available2021-10-16T03:36:21Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10921
dc.sourceIIOimport
dc.titleIn-situ fabrication of micro-optical elements in transparent encapsulants with excimer laser-ablation
dc.typeProceedings paper
dc.contributor.imecauthorRits, Olivier
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.source.peerreviewno
dc.source.beginpage124
dc.source.endpage127
dc.source.conferenceProceedings 15th European Microelectronics and Packaging Conference - EPMC
dc.source.conferencedate12/06/2005
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - imec


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