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Interactions at the interface between top-coat and resist

dc.contributor.authorOkumura, Haruki
dc.contributor.authorGronheid, Roel
dc.contributor.authorNakanishi, Kana
dc.contributor.authorKishimura, Shinji
dc.date.accessioned2021-10-16T03:45:22Z
dc.date.available2021-10-16T03:45:22Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10952
dc.sourceIIOimport
dc.titleInteractions at the interface between top-coat and resist
dc.typeProceedings paper
dc.contributor.imecauthorGronheid, Roel
dc.source.peerreviewno
dc.source.conference2nd International Symposium on Immersion Lithography
dc.source.conferencedate12/09/2005
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - imec


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