Authors

Onsia, Bart; Conard, Thierry; De Gendt, Stefan; Heyns, Marc; Hoflijk, Ilse; Mertens, Paul; Meuris, Peter; Raskin, G.; Sioncke, Sonja; Teerlinck, Ivo; Theuwis, A.; Van Steenbergen, Jan; Vinckier, Chris

Conference

Ultra Clean Processing of Silicon Surfaces VII: Proceedings of the 7th International Symposium

Title

A study of the influence of typical wet chemical treatments on the germanium wafer surface

Publication type

Proceedings paper