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Design and fabrication of a surface micromachined frequency tunable film bulk acoustic resonator with an extended electrostatic tuning range

dc.contributor.authorPan, Wanling
dc.contributor.authorSoussan, Philippe
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-16T03:52:04Z
dc.date.available2021-10-16T03:52:04Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10975
dc.sourceIIOimport
dc.titleDesign and fabrication of a surface micromachined frequency tunable film bulk acoustic resonator with an extended electrostatic tuning range
dc.typeProceedings paper
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage1840
dc.source.endpage1843
dc.source.conferenceProceedings IEEE International Ultrasonics Symposium
dc.source.conferencedate18/09/2005
dc.source.conferencelocationRotterdam The Netherlands
imec.availabilityPublished - imec


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