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Influence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowth

dc.contributor.authorPawlak, Bartek
dc.contributor.authorDuffy, Ray
dc.contributor.authorJanssens, Tom
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMaex, Karen
dc.contributor.authorSmith, A.J.
dc.contributor.authorCowern, N.E.B
dc.contributor.authorDao, T.
dc.contributor.authorTamminga, Y.
dc.date.accessioned2021-10-16T04:01:30Z
dc.date.available2021-10-16T04:01:30Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11007
dc.sourceIIOimport
dc.titleInfluence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowth
dc.typeJournal article
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage031915-1
dc.source.endpage031915-3
dc.source.journalApplied Physics Letters
dc.source.issue3
dc.source.volume87
imec.availabilityPublished - imec


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