Authors

Pawlak, Bartek; Duffy, Ray; Janssens, Tom; Vandervorst, Wilfried; Maex, Karen; Smith, A.J.; Cowern, N.E.B; Dao, T.; Tamminga, Y.

Issue

3

Journal

Applied Physics Letters

Volume

87

Title

Influence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowth

Publication type

Journal article