Publication:
Influence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowth
Date
| dc.contributor.author | Pawlak, Bartek | |
| dc.contributor.author | Duffy, Ray | |
| dc.contributor.author | Janssens, Tom | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Smith, A.J. | |
| dc.contributor.author | Cowern, N.E.B | |
| dc.contributor.author | Dao, T. | |
| dc.contributor.author | Tamminga, Y. | |
| dc.contributor.imecauthor | Pawlak, Bartek | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-16T04:01:30Z | |
| dc.date.available | 2021-10-16T04:01:30Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11007 | |
| dc.source.beginpage | 031915-1 | |
| dc.source.endpage | 031915-3 | |
| dc.source.issue | 3 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 87 | |
| dc.title | Influence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowth | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |