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Influence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowth
Publication:
Influence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowth
Date
2005
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pawlak, Bartek
;
Duffy, Ray
;
Janssens, Tom
;
Vandervorst, Wilfried
;
Maex, Karen
;
Smith, A.J.
;
Cowern, N.E.B
;
Dao, T.
;
Tamminga, Y.
Journal
Applied Physics Letters
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1908
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
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Views
1908
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations