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On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers
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Authors
Petry, Jasmine
;
Vandervorst, Wilfried
;
Pantisano, Luigi
;
Degraeve, Robin
Issue
5_6
Journal
Microelectronics Reliability
Volume
45
Title
On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers
Publication type
Journal article
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