On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers
dc.contributor.author | Petry, Jasmine | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Pantisano, Luigi | |
dc.contributor.author | Degraeve, Robin | |
dc.date.accessioned | 2021-10-16T04:03:57Z | |
dc.date.available | 2021-10-16T04:03:57Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11015 | |
dc.source | IIOimport | |
dc.title | On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers | |
dc.type | Journal article | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Degraeve, Robin | |
dc.source.peerreview | no | |
dc.source.beginpage | 815 | |
dc.source.endpage | 818 | |
dc.source.journal | Microelectronics Reliability | |
dc.source.issue | 5_6 | |
dc.source.volume | 45 | |
imec.availability | Published - imec |
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