Wafer level packaging of micro/nanosystems
dc.contributor.author | Pieters, Philip | |
dc.date.accessioned | 2021-10-16T04:05:07Z | |
dc.date.available | 2021-10-16T04:05:07Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11019 | |
dc.source | IIOimport | |
dc.title | Wafer level packaging of micro/nanosystems | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Pieters, Philip | |
dc.source.peerreview | no | |
dc.source.beginpage | 130 | |
dc.source.endpage | 133 | |
dc.source.conference | Proceedings of the 5th IEEE Conference on Nanotechnology | |
dc.source.conferencedate | 11/07/2005 | |
dc.source.conferencelocation | Nagoya Japan | |
imec.availability | Published - imec |
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