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Wafer level packaging of micro/nanosystems

dc.contributor.authorPieters, Philip
dc.date.accessioned2021-10-16T04:05:07Z
dc.date.available2021-10-16T04:05:07Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11019
dc.sourceIIOimport
dc.titleWafer level packaging of micro/nanosystems
dc.typeProceedings paper
dc.contributor.imecauthorPieters, Philip
dc.source.peerreviewno
dc.source.beginpage130
dc.source.endpage133
dc.source.conferenceProceedings of the 5th IEEE Conference on Nanotechnology
dc.source.conferencedate11/07/2005
dc.source.conferencelocationNagoya Japan
imec.availabilityPublished - imec


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