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Stoichiometric changes of Si, CoSi2 and TiSi2 during low energy oxygen bombardment in combination with oxygen bleed-in

dc.contributor.authorBrijs, Bert
dc.contributor.authorDeleu, Jeroen
dc.contributor.authorStorm, Wolfgang
dc.contributor.authorDe Coster, Walter
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-29T14:18:05Z
dc.date.available2021-09-29T14:18:05Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1105
dc.sourceIIOimport
dc.titleStoichiometric changes of Si, CoSi2 and TiSi2 during low energy oxygen bombardment in combination with oxygen bleed-in
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage541
dc.source.endpage546
dc.source.journalNuclear Instruments and Methods in Physics Research B
dc.source.volume118
imec.availabilityPublished - open access


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