Authors

Brijs, Bert; Deleu, Jeroen; Storm, Wolfgang; De Coster, Walter; Vandervorst, Wilfried

Journal

Nuclear Instruments and Methods in Physics Research B

Volume

118

Title

Stoichiometric changes of Si, CoSi2 and TiSi2 during low energy oxygen bombardment in combination with oxygen bleed-in

Publication type

Journal article

Embargo date

9999-12-31