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Stoichiometric changes of Si, CoSi2 and TiSi2 during low energy oxygen bombardment in combination with oxygen bleed-in
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Stoichiometric changes of Si, CoSi2 and TiSi2 during low energy oxygen bombardment in combination with oxygen bleed-in
Date
1996
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Brijs, Bert
;
Deleu, Jeroen
;
Storm, Wolfgang
;
De Coster, Walter
;
Vandervorst, Wilfried
Journal
Nuclear Instruments and Methods in Physics Research B
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1977
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-09
Citations
Metrics
Views
1977
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-09
Citations